Published 1975 | Version v1
Report Restricted

Use of radioactive tracers in the industry of semi-conductors

Creators

  • 1. Isotopen Technik Dr. Sauerwein G.m.b.H., Duesseldorf (F.R. Germany)

Description

Radioactive tracer techniques play an important part in the production processes of semiconductor devices. Topics dealt with are purification of raw material, quality control, production and doping of monocrystals. Testing for leaks in capsuled semiconductor devices is another field of application

Availability note (English)

MF available from INIS under the Report Number.

Files

Restricted

The record is publicly accessible, but files are restricted to users with access.

Additional details

Additional titles

Original title (German)
Anwendung radioaktiver Indikatoren in der Halbleiterindustrie

Publishing Information

Imprint Pagination
100 p.
Report number
EURISOTOP--96

INIS

Country of Publication
European Commission (EC), Brussels (Belgium)
Country of Input or Organization
European Commission (EC), Brussels (Belgium)
INIS RN
6204906
Subject category
S07: ISOTOPES AND RADIATION SOURCES;
Descriptors DEI
ALUMINIUM; AUTORADIOGRAPHY; CRYSTAL DOPING; ELECTROLYSIS; FABRICATION; GERMANIUM; GERMANIUM CHLORIDES; IMPURITIES; LABELLED COMPOUNDS; MONOCRYSTALS; PURIFICATION; RADIATION EFFECTS; RADIOISOTOPES; REFINING; SEMICONDUCTOR DETECTORS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR MATERIALS; SILANES; SILICON; SILICON CHLORIDES; SPATIAL DISTRIBUTION; TRACER TECHNIQUES; ZONE MELTING
Descriptors DEC
CHLORIDES; CHLORINE COMPOUNDS; CRYSTALS; DISTRIBUTION; ELEMENTS; GERMANIUM COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; HYDRIDES; HYDROGEN COMPOUNDS; ISOTOPE APPLICATIONS; ISOTOPES; MEASURING INSTRUMENTS; MELTING; METALS; PHASE TRANSFORMATIONS; RADIATION DETECTORS; RADIOACTIVE MATERIALS; SEMIMETALS; SILICON COMPOUNDS