Published March 1981 | Version v1
Journal article

Erosion of hot refractory metals caused by low-energy ions

  • 1. Sergo Ordzhonikidze Aviation Institute, Moscow

Description

The erosion of polycrystalline tungsten at temperatures in the range 1000--1900 K by argon ions at energies in the range 50--100 eV has been studied experimentally. A theory is derived for the sputtering rate under these conditions. It is shown that the sputtering rate is affected not only by the ion energy but also, and strongly, by the surface temperature. A ''hotspot'' model is used to derive a semiempirical equation for the sputtering coefficient as a function of the ion energy and the target temperature. The specific erosion of cathodes in high-current discharges caused by sputtering and evaporation is calculated

Additional details

Publishing Information

Journal Title
Sov. J. Plasma Phys. (Engl. Transl.)
Journal Volume
7
Journal Issue
2
Series
Sov. J. Plasma Phys. (Engl. Transl.).
Journal Page Range
239-242

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
13700874
Subject category
S74: ATOMIC AND MOLECULAR PHYSICS;
Descriptors DEI
ARGON IONS; CATHODES; COLLISIONS; DIVERTORS; EROSION; EV RANGE 10-100; LIMITERS; SPUTTERING; TARGETS; TUNGSTEN; VERY HIGH TEMPERATURE
Descriptors DEC
CHARGED PARTICLES; ELECTRODES; ELEMENTS; ENERGY RANGE; EV RANGE; IONS; METALS; TRANSITION ELEMENTS