Published October 15, 1984 | Version v1
Journal article Metadata-only

Phase sensitive scanning optical microscope

Creators

  • 1. Edward L. Ginzton Laboratory, W.W. Hansen Laboratories of Physics, Stanford University, Stanford, California 94305

Description

An electronically scanned optical microscope which quantitatively measures amplitude and phase is described. The system is insenstive to mechanical vibrations. The phase infromation makes it possible to measure surface height variations with an accuracy of better than 100 A and can also be used to improve the lateral resolution

Additional details

Publishing Information

Journal Title
Appl. Phys. Lett.
Journal Volume
45
Journal Issue
8
Series
Appl. Phys. Lett.
Journal Page Range
846-848
ISSN
0003-6951

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
16045195
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
AMORPHOUS STATE; ANNEALING; BORON; DIFFUSION; DISLOCATIONS; FLUORINE; IMPURITIES; ION IMPLANTATION; MASS SPECTROSCOPY; MOLECULAR IONS; P-N JUNCTIONS; SILICON; SOLID CLUSTERS; SOLUBILITY; STACKING FAULTS; SURFACES; TRANSMISSION ELECTRON MICROSCO
Descriptors DEC
CHARGED PARTICLES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ELECTRON MICROSCOPY; ELEMENTS; HALOGENS; HEAT TREATMENTS; IONS; LINE DEFECTS; MICROSCOPY; NONMETALS; SEMICONDUCTOR JUNCTIONS; SEMIMETALS; SPECTROSCOPY