Published February 1992
| Version v1
Journal article
Ion implantation of diamond-like carbon films
Description
Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The resistivities of the implanted films decreased dramatically under a dose of 2 x 1016 Ar/cm2. IR spectra and optical gap Eopt were measured. It was found that the sp2 and sp3 components decreased due to the loss of hydrogen during implantation, and the ratio of components sp2 bonds to sp3 bonds increased with the ion dose. And Eopt decreased from 1.46 eV to 0.83 eV. The hydrogen (bonded and un-bonded) contents in the films were measured with the nuclear resonant reaction 1H(19F, α γ)16O. It is shown that hydrogen plays an important role in affecting some properties of DLC films
Additional details
Publishing Information
- Journal Title
- Nuclear Science and Techniques
- Journal Volume
- 3
- Journal Issue
- 1
- Journal Page Range
- p. 25-29.
- ISSN
- 1001-8042
- CODEN
- NSETEC
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 24040692
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ARGON IONS; CARBON; CHEMICAL BONDS; DIAMONDS; ELECTRIC CONDUCTIVITY; ENERGY GAP; HYDROGEN; INFRARED SPECTRA; ION IMPLANTATION; KEV RANGE 100-1000; RADIATION DOSES; THIN FILMS
- Descriptors DEC
- CHARGED PARTICLES; ELECTRICAL PROPERTIES; ELEMENTS; ENERGY RANGE; FILMS; IONS; KEV RANGE; MINERALS; NONMETALS; PHYSICAL PROPERTIES; SPECTRA