Temperature effects in photon emission from sputtered atoms

The temperature dependence Y*(T) of ion-bombardment-induced photon emission from sputtered species of a polycrystalline copper target is measured under conditions in which there is a pronounced increase of the sputtering yield Y at elevated temperatures. The dependences Y*(T) for the CuI lines (neutral atoms) are similar to the dependence Y(T), whereas the CuII line (ionized sputtered atoms) intensity is practically independent of the target temperature. The dependences of the photon emission for the CuI and CuII lines on ion incidence angle have also been found to be very different. (author)