Published 1995 | Version v1
Miscellaneous

The measurement of atomic and ionic densities in processing plasmas

  • 1. Flinders Univ. of South Australia, Bedford Park, SA (Australia)

Description

Short communication

Part of:
20. AINSE plasma science and technology conference. Conference handbook

Additional details

Publishing Information

Imprint Place
Lucas Heights (Australia)
Imprint Title
20. AINSE plasma science and technology conference. Conference handbook
Imprint Pagination
64 p.
Journal Page Range
p. 43.
Report number
INIS-mf--14745

Conference

Title
20. AINSE plasma science and technology conference.
Dates
13-14 Feb 1995.
Place
Adelaide, SA (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
27042969
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ABSORPTION SPECTROSCOPY; INTERFEROMETRY; ION DENSITY; MAGNETRONS; PLASMA DENSITY; RF SYSTEMS
Descriptors DEC
ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; MICROWAVE EQUIPMENT; MICROWAVE TUBES; SPECTROSCOPY

Optional Information