Published 1999
| Version v1
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Study of atomic hydrogen influence on polycrystal semiconductor thin films
Creators
- 1. Zaporozhskij gosudarstvennyj tekhnicheskij universitet, Zaporoz'e (Ukraine)
Description
Interaction of atomic hydrogen with polycrystal semiconductor thin films was studied. Physical mechanism of this process was proposed
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32051666.pdf
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Additional details
Additional titles
- Original title (Russian)
- Исследование влияния атомарного водорода на поликристаллические тонкие пленки полупроводников
Publishing Information
- Imprint Title
- 3. International Symposium 'Vacuum Technology and Equipment'. ISVTE-3
- Imprint Pagination
- 173 p.
- Journal Page Range
- p. 107-110
- Report number
- INIS-UA--071(V.1)
Conference
- Title
- 3. International Symposium 'Vacuum Technology and Equipment', Vol. 1.
- Original Conference Title
- Trudy tret'ego mezhdunarodnogo simpoziuma 'Vakuumnye tekhnologii i oborudovanie', Tom 1
- Dates
- 22-24 Sep 1999
- Place
- Khar'kov (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 32051666
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COLD PLASMA; CRYSTAL-PHASE TRANSFORMATIONS; HYDROGEN; POLYCRYSTALS; RECRYSTALLIZATION; SILICON; THIN FILMS
- Descriptors DEC
- CRYSTALS; ELEMENTS; FILMS; NONMETALS; PHASE TRANSFORMATIONS; PLASMA; SEMIMETALS
Optional Information
- Notes
- Imprint:3. Mezhdunarodnyj Simpozium 'Vakuumnye tekhnologii i oborudovanie'. ISVTE-3