Published September 1988 | Version v1
Journal article Metadata-only

Chemiluminescence and formation of electron-excited radicals during interaction of Si with XeF2

Creators

  • 1. AN SSSR, Novosibirsk. Inst. Fiziki Poluprovodnikov

Description

Spectra and kinetic regularities of chemiluminescence in the visible spectrum region, occuring during monocrystalline Si interaction with XeF2, were investigated. It was concluded that luminescent particles were presented by SiF3 radicals, formed in result of gaseous phase reaction of desorbing from silicon surface long-living SiF2 radicals with XeF2

Additional details

Additional titles

Original title (Russian)
Хемилюминесценция и образование электронно-возбужденных радикалов при взаимодействии Си с XeF

Publishing Information

Journal Title
Kinetika i Kataliz
Journal Volume
29
Journal Issue
5
Series
Kinet. Katal.
Journal Page Range
1031-1037
ISSN
0453-8811
CODEN
KNKTA

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
20028708
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Descriptors DEI
CHEMICAL REACTIONS; CHEMILUMINESCENCE; EMISSION SPECTRA; EXCITED STATES; HIGH TEMPERATURE; LOW PRESSURE; PRESSURE DEPENDENCE; RADICALS; REACTION INTERMEDIATES; SILICON; SILICON FLUORIDES; XENON FLUORIDES
Descriptors DEC
ELEMENTS; EMISSION; ENERGY LEVELS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; LUMINESCENCE; PHOTON EMISSION; RARE GAS COMPOUNDS; SEMIMETALS; SILICON COMPOUNDS; SPECTRA; XENON COMPOUNDS