Published 2000 | Version v1
Journal article Metadata-only

Sputtering of carbon materials by hydrogen, deuterium and helium ions of subthreshold energies

Creators

  • 1. GNTs RF Institut teoreticheskoj i ehksperimental'noj fiziki, Moskva (Russian Federation)
  • 2. RNTs Kurchatovskij institut, Moskva (Russian Federation)
  • 3. Moskovskij inzhenerno-fizicheskij institut, Moskva (Russian Federation)

Description

Methodic of sputtering coefficient determination for conducting materials at light ion bombardment in 10...500 eV energy range was developed. Energy dependencies of sputtering coefficient by hydrogen, deuterium and helium ions were studied

Additional details

Additional titles

Original title (Russian)
Распыление углеродных материалов ионами водорода, дейтерия и гелия в припороговой области энергий

Publishing Information

Journal Title
Voprosy Atomnoj Nauki i Tekhniki. Fizika Radiatsionnykh Povrezhdenij i Radiatsionnoe Materialovedenie
Journal Issue
no.4
Journal Page Range
p. 6-10
ISSN
0134-5400
CODEN
VAFMDP

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
32047322
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
CARBON; DEUTERIUM IONS; ENERGY DEPENDENCE; FIBERS; HELIUM IONS; HYDROGEN IONS; ION BEAMS; ION MICROSCOPY; PHYSICAL RADIATION EFFECTS; PYROLYTIC CARBON; REACTOR MATERIALS; SPUTTERING
Descriptors DEC
BEAMS; CARBON; CHARGED PARTICLES; ELEMENTS; IONS; MATERIALS; MICROSCOPY; NONMETALS; RADIATION EFFECTS