Published 1995 | Version v1
Miscellaneous Metadata-only

Frequency noise level of As ion implanted TiN-Ti-Si structures

Creators

  • 1. VINCA Inst. of Nuclear Sciences, PO Box 522, 11001 Belgrade (Yugoslavia)
  • 2. Surrey Univ., Guildford (United Kingdom). Dept. of Electronic and Electrical Engineering

Description

Short communication

Part of:
16. International Conference on Atomic Collisions in Solids. Book of abstracts

Additional details

Publishing Information

Imprint Title
16. International Conference on Atomic Collisions in Solids. Book of abstracts
Imprint Pagination
168 p.
Journal Page Range
p. B93.
Report number
INIS-mf--14833

Conference

Title
16. International Conference on Atomic Collisions in Solids.
Dates
17-21 Jul 1995.
Place
Linz (Austria).

INIS

Country of Publication
Austria
Country of Input or Organization
Austria
INIS RN
27064708
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ARSENIC; BACKSCATTERING; DOSE RATES; FREQUENCY ANALYSIS; IONS; LAYERS; NOISE; SPECTRA; SPUTTERING; TITANIUM NITRATES; TITANIUM SILICIDES
Descriptors DEC
CHARGED PARTICLES; ELEMENTS; NITRATES; NITROGEN COMPOUNDS; OXYGEN COMPOUNDS; SCATTERING; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information