Published May 4, 2017 | Version v1
Journal article Metadata-only

Effect of different methods of preliminary surface treatment and magnetron sputtering on the adhesion of Si coatings

Creators

  • 1. Tomsk State University, Tomsk 634050 (Russian Federation)

Description

The paper presents research results on the adhesion of Si coatings deposited by magnetron sputtering on NiTi substrates after preliminary surface treatment (cleaning and activation) with low-energy ion beams and gas discharge plasma. The adhesion properties of the coatings obtained by two methods are analyzed and compared using data of scratch and spherical abrasion tests. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/830/1/012105

Additional details

Identifiers

DOI
10.1088/1742-6596/830/1/012105;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
830
Journal Issue
1
Journal Page Range
[5 p.]
ISSN
1742-6596

Conference

Title
5. international congress on energy fluxes and radiation effects
Dates
2-7 Oct 2016
Place
Tomsk (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
49019608
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ABRASION; ADHESION; CLEANING; COATINGS; COMPARATIVE EVALUATIONS; INTERMETALLIC COMPOUNDS; ION BEAMS; MAGNETRONS; NICKEL; PLASMA; SILICON; SPHERICAL CONFIGURATION; SPUTTERING; SUBSTRATES; SURFACE TREATMENTS; SURFACES; TITANIUM
Descriptors DEC
ALLOYS; BEAMS; CONFIGURATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; EVALUATION; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; SEMIMETALS; TRANSITION ELEMENTS