Cathodoluminescence and depth profiling studies of unintentionally doped GaN films grown by MOVPE

GaN layers are grown by metalorganic vapor phase epitaxy at 1050 °C on porous silicon and (111) oriented silicon substrates. AlN buffer layers of about 100 nm thickness were previously deposited on Si substrates. The effect of substrates on optical properties is revealed by Cathodoluminescence measurements (CL), recorded at room temperature and liquid nitrogen temperature. Various excitonic transitions are depicted. Spectral features associated with F°X energy around 3.4 eV and bound excitons (D°X and A°X in the range 3.29–3.35 eV) related to wurtzite GaN excitons are observed. Yellow band is located around 2.15 eV. CL depth profiling is also investigated at various e-beam energies (3–25 keV). The low-energy electron beam irradiation reveals an inhomogeneous distribution of point defects in depth, and high non-radiative recombination beyond a threshold energy. Good agreement between our experimental data and literature is obtained. Moreover, CL investigations prove that growth of GaN on (111) oriented Si substrate improve the crystalline quality of the layer. (paper)