Study on cooling for optical parts with high heat loads at the SSRF

The performance of optical elements in the beamline is very sensitive with the deformation caused by high heat loads, which require special cooling methods to preserve the quality of the photon beam. In the paper, the thermal analyses of two kinds of mirrors are presented. One of mirrors made of silicon is used to collimate X-ray; another mirror made of copper is used to reflect infrared light. Different indirect water cooling methods, side cooling and bottom cooling, are adopted for them. By means of optimization design using Ansys software, better slope of two mirrors is achieved. Optimization procedures for reducing their slope error are also described.