Published March 2008 | Version v1
Journal article Metadata-only

Magnetic quadrupole doublet focusing system for high energy ions

Creators

  • 1. Louisiana Accelerator Center/Physics Department, The University of Louisiana at Lafayette, P.O. Box 44210, Lafayette, Louisiana 70504-4210 (United States)
  • 2. Department of Physics, University of North Texas, P.O. Box 311427, Denton, Texas 76203 (United States)

Description

A high energy focused ion beam microprobe using a doublet arrangement of short magnetic quadrupole lenses was used to focus 1-3 MeV protons to spot sizes of 1x1 μm2 and 1-4.5 MeV carbon and silicon ion beams to spot sizes of 1.5x1.5 μm2. The results presented clearly demonstrate that this simple doublet configuration can provide high energy microbeams for microananalysis and microfabrication applications

Additional details

Identifiers

DOI
10.1063/1.2890101;

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
79
Journal Issue
3
Journal Page Range
p. 036102-036102.3
ISSN
0034-6748
CODEN
RSINAK

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
40006541
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Descriptors DEI
CARBON; CONFIGURATION; FOCUSING; ION BEAMS; LENSES; MEV RANGE; PROTONS; QUADRUPOLES; SILICON IONS
Descriptors DEC
BARYONS; BEAMS; CHARGED PARTICLES; ELEMENTARY PARTICLES; ELEMENTS; ENERGY RANGE; FERMIONS; HADRONS; IONS; MULTIPOLES; NONMETALS; NUCLEONS

Optional Information

Notes
(c) 2008 American Institute of Physics