High-Tc superconducting Bi based thin films prepared by layer controlled deposition

High-Tc superconducting thin films of bismuth layered perovskite were artificially prepared by reactive sequential deposition of Bi, SrCu, and CaCu using DC magnetron multitarget sputtering. This deposition technique achieves a selective growth for bismuth system composed with four and five CuO planes by controlling the deposition time of CaCu oxide and its input power. These were post annealed and it was made sure that thin films with five Cu-O planes did not exhibit zero resistivity. In order to obtain the as-deposited superconducting thin films, intermittent deposition technique was investigated. The details about this fabrication process are studied referring to superconducting properties and crystal structure