Published June 1990 | Version v1
Journal article Metadata-only

Ion implantation

Creators

  • 1. Poona Univ., Pune (India). Dept. of Physics and Advanced Study Centre in Materials Science and Solid State Physics

Description

The current status of ion implantation research is reviewed with special emphasis on the activity at the University of Poona. Prospects for the future are indicated. (author). 79 refs., 17 figs

Additional details

Publishing Information

Journal Title
Indian Journal of Technology
Journal Volume
28
Journal Issue
6-8
Series
Indian J. Technol.
Journal Page Range
486-499
ISSN
0019-5669
CODEN
IJOTA

INIS

Country of Publication
India
Country of Input or Organization
India
INIS RN
22029969
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
INDIA; ION BEAMS; ION IMPLANTATION; RESEARCH PROGRAMS; REVIEWS; USES
Descriptors DEC
ASIA; BEAMS; DEVELOPING COUNTRIES; DOCUMENT TYPES