Published February 26, 2010 | Version v1
Journal article

Observation of a paramagnetic defect at the epitaxial Ge3N4/(111)Ge interface by electron spin resonance

  • 1. Department of Physics and Astronomy and INPAC-Institute for Nanoscale Physics and Chemistry, University of Leuven, Celestijnenlaan 200 D, 3001 Leuven (Belgium)
  • 2. IMEC, Kapeldreef 75, 3002 Leuven (Belgium)

Description

A multifrequency electron spin resonance (ESR) study of Ge3N4/(111)Ge entities with nm thick epitaxial Ge3N4 layers, of subcritical thickness for mismatch relaxation, grown in a nitrogen plasma reveals the presence of an anisotropic paramagnetic interface center of trigonal symmetry. Building on the analysis of its specific ESR properties, including magnetic field angular mapping data and in the light of previous insight, the signal is tentatively ascribed to the interfacial ·Ge≡N3 center. The defect occurrence is discussed within the specific interface matching, without misfit dislocations. As an interfacial Ge dangling bond defect, it may operate as an inherent electrically detrimental trap.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.tsf.2009.09.181

Additional details

Identifiers

DOI
10.1016/j.tsf.2009.09.181;
PII
S0040-6090(09)01776-3;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
518
Journal Issue
9
Journal Page Range
p. 2361-2364
ISSN
0040-6090
CODEN
THSFAP

Conference

Title
Silicon and germanium issues for future CMOS devices
Acronym
EMRS 2009 spring meeting - Symposium I
Dates
8-12 Jun 2009
Place
Strasbourg (France)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
42059864
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANISOTROPY; DISLOCATIONS; ELECTRON SPIN RESONANCE; EPITAXY; GERMANIUM; GERMANIUM NITRIDES; INTERFACES; LAYERS; MAGNETIC FIELDS; NITROGEN; PARAMAGNETISM; PLASMA; RELAXATION
Descriptors DEC
CRYSTAL DEFECTS; CRYSTAL GROWTH METHODS; CRYSTAL STRUCTURE; ELEMENTS; GERMANIUM COMPOUNDS; LINE DEFECTS; MAGNETIC RESONANCE; MAGNETISM; METALS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; RESONANCE

Optional Information

Copyright
Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.