Published February 26, 2010
| Version v1
Journal article
Observation of a paramagnetic defect at the epitaxial Ge3N4/(111)Ge interface by electron spin resonance
- 1. Department of Physics and Astronomy and INPAC-Institute for Nanoscale Physics and Chemistry, University of Leuven, Celestijnenlaan 200 D, 3001 Leuven (Belgium)
- 2. IMEC, Kapeldreef 75, 3002 Leuven (Belgium)
Description
A multifrequency electron spin resonance (ESR) study of Ge3N4/(111)Ge entities with nm thick epitaxial Ge3N4 layers, of subcritical thickness for mismatch relaxation, grown in a nitrogen plasma reveals the presence of an anisotropic paramagnetic interface center of trigonal symmetry. Building on the analysis of its specific ESR properties, including magnetic field angular mapping data and in the light of previous insight, the signal is tentatively ascribed to the interfacial ·Ge≡N3 center. The defect occurrence is discussed within the specific interface matching, without misfit dislocations. As an interfacial Ge dangling bond defect, it may operate as an inherent electrically detrimental trap.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.tsf.2009.09.181Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2009.09.181;
- PII
- S0040-6090(09)01776-3;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 518
- Journal Issue
- 9
- Journal Page Range
- p. 2361-2364
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- Silicon and germanium issues for future CMOS devices
- Acronym
- EMRS 2009 spring meeting - Symposium I
- Dates
- 8-12 Jun 2009
- Place
- Strasbourg (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 42059864
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANISOTROPY; DISLOCATIONS; ELECTRON SPIN RESONANCE; EPITAXY; GERMANIUM; GERMANIUM NITRIDES; INTERFACES; LAYERS; MAGNETIC FIELDS; NITROGEN; PARAMAGNETISM; PLASMA; RELAXATION
- Descriptors DEC
- CRYSTAL DEFECTS; CRYSTAL GROWTH METHODS; CRYSTAL STRUCTURE; ELEMENTS; GERMANIUM COMPOUNDS; LINE DEFECTS; MAGNETIC RESONANCE; MAGNETISM; METALS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; RESONANCE
Optional Information
- Copyright
- Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.