A new method for measuring thickness using convergent beam diffraction

Knowing the true thickness of thin foil is very important in quantitative analysis in TEM study. Especially, in calculating the distribution of particle, bubble or pore size of irradiated material, some amount of error will be included if the exact thickness is not known. Normally the thickness of thin foil is assumed to be 1 micron in TEM work. It causes serious error in some analysis. A simple and accurate method of measuring the thickness of thin foil is recommended in this paper. It uses the relationship between extinction distance, X-ray counts and thickness. During the process extinction distance of activated plane can be also calculated. (Author)