Kinetic modelling of atom production and thermalization in CCRF discharges in H2

Two kinetic models are applied to H atoms in capacitively coupled, radio-frequency H2 discharges. A multicomponent particle-in-cell with Monte Carlo collisions kinetic model of the plasma phase, including several ionic species, electrons, molecules in specific internal states, is used to determine the atom source term in the whole discharge volume, while a Monte Carlo model is applied to H atoms. Using these models it is possible to treat the whole cycle of H atoms including production, slowing-down and development of the thermalized component and to account for the total atomic balance in the gas phase. The relevance of different atom production channels is quantitatively discussed, and results for the energy distribution and energy flux distribution on surfaces are given. Recommendations for H atom kinetics data are provided. (paper)