Published 1995 | Version v1
Book Metadata-only

Ion kinetics in a helicon plasma source reactor

Creators

  • 1. Universite Joseph Fourier, Saint Martin d'Heres (France)

Description

In this contribution we present correlated measurements of plasma optical emission, plasma potential and density, and ion axial and radial drift velocities in an extended open-quotes heliconclose quotes source/diffusion chamber system. This enables us to have insights about plasma excitation, transport and loss processes in this low pressure, high density plasma source

Additional details

Publishing Information

Publisher
Stevens Institute of Technology.
Imprint Place
Hoboken, NJ (United States)
Imprint Title
XXII International conference on phenomena in ionized gases. Contributed papers 2
Imprint Pagination
226 p.
Journal Page Range
p. 99-100.

Conference

Title
22. international conference on phenomena in ionized gases.
Dates
31 Jul - 4 Aug 1995.
Place
Hoboken, NJ (United States).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
27046146
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARGON IONS; KINETICS; LANGMUIR PROBE; PLASMA; PLASMA DENSITY
Descriptors DEC
CHARGED PARTICLES; ELECTRIC PROBES; IONS; PROBES

Optional Information

Secondary number(s)
CONF-950749--.