Preliminary research on imaging in MEMS electron microscope

The purpose of this article is to present preliminary results of research on imaging in a newly designed and micro-electro-mechanical system (MEMS) transmission electron microscope being developed. The main element of the MEMS microscope is an electron gun with an anode, which contains a very thin silicon nitride membrane; it separates the high-vacuum chamber of the microdevice from a sample that is located outside an electron optics column, on the anode in the air. The parallel electron beam that passes the membrane illuminates the studied sample. Thus, a new detection system, located outside the MEMS electron microscope structure, has to be developed. In this paper, the results of the computer simulations and the measurements of transmissivity and a scattering angle of the electron beam passing through a very thin silicon nitride membrane are presented. The influence of these parameters on the image generated on the scintillator crystal screen, placed above the anode with a sample, is considered. We also present an image of a copper wire placed over the thin silicon nitride membrane that was produced using the designed detection system. (paper)