Structural, compositional and morphological studies of thermally evaporated MoO3 thin films

Molybdenum oxide (MoO3) nanostructures were grown on different substrates such as glass, indium tin oxide coated glass and fluorine doped glass by thermal evaporation of MoO3 powder at elevated temperature (750°C) using tube furnace without any catalyst and then by subsequent O2/Ar flow rate. The morphology, composition and crystal structure were examined by using SEM, EDAX, Laser Raman and XRD. The films are polycrystalline with well-defined diffraction peaks and it consist of MoO3 with α-orthorhombic structure. The synthesized MoO3 belongs to different morphologies, generally nanobelt and nanohunk structures. The EDAX spectra confirm the films are composed only of Mo and O atoms. The O/Mo ratio is nearly equal to 3 that shows the stoichiometry of MoO3