Published December 2000 | Version v1
Journal article

High resolution surface analysis with elastic recoil detector

  • 1. China Inst. of Atomic Energy, Beijing (China). Dept. of Nuclear Physics

Description

High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI-13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small ΔE-E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La2SrCuO4 superconductor and GaN foil samples

Additional details

Publishing Information

Journal Title
Nuclear Physics Review
Journal Volume
17
Journal Issue
4
Journal Page Range
p. 228-230
ISSN
1007-4627