Published December 2000
| Version v1
Journal article
High resolution surface analysis with elastic recoil detector
Creators
- 1. China Inst. of Atomic Energy, Beijing (China). Dept. of Nuclear Physics
Description
High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI-13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small ΔE-E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La2SrCuO4 superconductor and GaN foil samples
Additional details
Publishing Information
- Journal Title
- Nuclear Physics Review
- Journal Volume
- 17
- Journal Issue
- 4
- Journal Page Range
- p. 228-230
- ISSN
- 1007-4627
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 32018571
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- CARBON; CIAE; DEPTH; FOILS; GALLIUM NITRIDES; LITHIUM FLUORIDES; MAGNETIC SPECTROMETERS; NEUTRON PROBES; NEUTRON RADIOGRAPHY; PROTON RECOIL DETECTORS; RADIATION SCATTERING ANALYSIS; RECOILS; SPATIAL DISTRIBUTION; SPATIAL RESOLUTION; SPECTRA; SUPERCONDUCTING FILMS; SURFACES; TANDEM ELECTROSTATIC ACCELERATORS; TELESCOPE COUNTERS
- Descriptors DEC
- ACCELERATORS; ALKALI METAL COMPOUNDS; CHEMICAL ANALYSIS; CHINESE ORGANIZATIONS; DIMENSIONS; DISTRIBUTION; ELECTROSTATIC ACCELERATORS; ELEMENTS; FILMS; FLUORIDES; FLUORINE COMPOUNDS; GALLIUM COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; INDUSTRIAL RADIOGRAPHY; LITHIUM COMPOUNDS; LITHIUM HALIDES; MATERIALS TESTING; MEASURING INSTRUMENTS; NATIONAL ORGANIZATIONS; NEUTRON DETECTORS; NITRIDES; NITROGEN COMPOUNDS; NONDESTRUCTIVE ANALYSIS; NONDESTRUCTIVE TESTING; NONMETALS; PNICTIDES; PROBES; RADIATION DETECTORS; RESOLUTION; SPECTROMETERS; TESTING