Published 1988 | Version v1
Book

In situ tem observations of heavy ion damage in gallium arsenide

  • 1. Univ. of Illinois, Urbana, IL (USA)
  • 2. Argonne National Lab., Argonne, IL (USA)

Description

This paper discusses transmission electron microscopy experiments performed to investigate the lattice damage created by heavy-ion bombardments in GaAs. These experiments have been performed in situ by using the HVEM - Ion. Accelerator Facility at Argonne National Laboratory. Direct-impact amorphization is observed to occur in both n-type and semi-insulating GaAs irradiated to low ion doses at 30 Κ and room temperature. The probability of forming a visible defect is higher for low temperature irradiations than for room temperature irradiations

Additional details

Publishing Information

Publisher
Materials Research Society.
Imprint Place
Pittsburgh, PA (USA)
ISBN
0-931837-68-5
Imprint Title
Fundamentals of beam-solid interactions and transient thermal processing
Imprint Pagination
763 p.
Series
Materials Research Society symposium proceedings. Volume 100.
Journal Page Range
p. 293-298.

Conference

Title
Symposium on fundamentals of beam-solid interactions and transient thermal processing.
Dates
30 Nov - 3 Dec 1987.
Place
Boston, MA (USA).

Optional Information

Secondary number(s)
CONF-8711126--.