Multi-component transparent conductive oxide films on polyimide substrate prepared by radio frequency magnetron sputtering

Multi-component tin, zinc and cadmium oxide (Sn_xZn_yCd_1−x−yO) transparent conductive oxide coatings with high transparency and charge carrier mobility were prepared on polyimide substrates by radio frequency magnetron sputtering from powder targets. The films were columnar in morphological, but with defects present. The microstructure was nano-crystalline for the film containing the highest Cd content, and a mixture of amorphous and nano-crystalline for other films. The average transmittance within the visible wavelength range improved from 70% to 90% with decreasing Cd or Sn content in the films. The charge carrier concentrations of the films were of the order of 10¹⁶ cm⁻³, and the highest mobility reached 31 cm²/V s. This initial study of Sn_xZn_yCd_1−x−yO films on polyimide substrates shows promise for applications, such as flexible thin film transistors. - Highlights: • The Sn_xZn_yCd_{1 −x−y}O films sputtered from powder targets on polyimide. • A mixture of amorphous and nano-crystal structures was obtained. • Transmittance of Sn_xZn_yCd_{1−x −y}O films reached 90% at the wavelength of 650 nm. • Charge carrier concentration and mobility were 10¹⁶ cm⁻³ and up to 31 cm²/V s. • Charge carrier mobility increased as the increase of Cd content