Published 1979 | Version v1
Journal article

On the surface-normal energy distribution of sputtered recoils

  • 1. Salford Univ. (UK). Dept. of Electrical Engineering
  • 2. McMaster Univ., Hamilton, Ontario (Canada). Inst. for Materials Research

Description

It is shown that, if the recoil-energy distribution in front of a bombarded target is of the form 2Esub(e) (Esub(e)+U)-3dEsub(e), where U is the surface binding energy, then the corresponding surface-normal distribution is (E + U)-2dE. This being so, it is fairly straightforward to deduce the integral yield of sputtered ions or excited states, including allowance for electron exchange with the solid. Also treated are the integral and differential yields of sputtered excited states as a function of perpendicular distance from the target, as would be relevant if the photons from the excited states were detected over an edge (integral case) or through a slit (differential case). Curves of yield vs. distance should show a marked concave-upwards curvature on a semi-logarithmic plot, a result which is well-known experimentally. (author)

Additional details

Publishing Information

Journal Title
Radiat. Eff.
Journal Volume
45
Journal Issue
1-2
Series
Radiat. Eff.
Journal Page Range
45-48
ISSN
0033-7579

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
11566992
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ANGULAR DISTRIBUTION; BINDING ENERGY; DISTANCE; ENERGY SPECTRA; EQUATIONS; EXCITED STATES; IONS; MATHEMATICAL MODELS; RECOILS; SPUTTERING; SURFACES; TARGETS
Descriptors DEC
CHARGED PARTICLES; DISTRIBUTION; ENERGY; ENERGY LEVELS; SPECTRA