Published 1986 | Version v1
Book

Acceptor implantation in Insub(0.53)Gasub(0.47)As

  • 1. Centre National d'Etudes des Telecommunications (CNET), Centre de Recherches de Lannion, 22 (France)
  • 2. LCR Th-CSF, 91 - Orsay (France)

Description

Be, Mg, Zn and Hg have been implanted in Insub(0.53)Gasub(0.47)As. For Be, Mg and Zn, the quick diffusion of the implanted impurities yields difficulties to get a p-type layer after implantation and annealing. On the other hand, mercury does not diffuse towards the bulk and behaves as an acceptor dopant impurity -Thin p+ layers are obtained in Insub(0.53)Gasub(0.47)As by mercury implantation - A comparison based on the chemical profiles and on the electrical results is performed for the four acceptor impurities. (author)

Additional details

Publishing Information

Publisher
Adam Hilger Ltd.
Imprint Place
Bristol (UK)
ISBN
0-85498-170-5
Imprint Title
Gallium arsenide and related compounds 1985
Imprint Pagination
778 p.
Journal Issue
no. 79
Series
Inst. Phys., Conf. Ser.
Journal Page Range
p. 343-348.

Conference

Title
12. international symposium on gallium arsenide and related compounds.
Dates
23-26 Sep 1985.
Place
Karuizawa (Japan).