Published 2005 | Version v1
Miscellaneous

Integrated planar optical waveguide system with diamond-like carbon film as a sensing layer

  • 1. Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Warsaw (Poland)
  • 2. Institute of Materials Science and Engineering, Technical University of Lodz, Lodz (Poland)

Description

Integrated optical waveguide system for sensing purposes is presented. Possibility of using diamond-like (DLC) film as a part of intensity based optical waveguide sensing system has been investigated. Integrated structure includes planar optical waveguide obtained by ion-exchange method in soda-lime glass, joined photodiode and DLC film as a sensing part. Technological problems were also raised. Photocurrent alterations could be good adhesion under influence of various mediums. Obtained film DLC can be characterized by good adhesion and stability even under hundreds of substance dosing procedures. Possible system's upgrades are discussed. (author)

Part of:
Proceedings of 29. International Conference of International Microelectronics and Packing Society, Polish Chapter. IMAPS - Poland 2005

Additional details

Publishing Information

Imprint Title
Proceedings of 29. International Conference of International Microelectronics and Packing Society, Polish Chapter. IMAPS - Poland 2005
Imprint Pagination
460 p.
Journal Page Range
p. 341-344

Conference

Title
29. International Conference of International Microelectronics and Packing Society, Polish Chapter. IMAPS - Poland 2005
Dates
18-21 Sep 2005
Place
Koszalin-Darlowko (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
37029662
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, Non-conventional Literature
Descriptors DEI
ADHESION; DIAMONDS; FILMS; ION EXCHANGE; LAYERS; PHOTOCURRENTS; PHOTODIODES; SENSITIVITY; WAVEGUIDES
Descriptors DEC
CARBON; CURRENTS; ELECTRIC CURRENTS; ELEMENTS; MINERALS; NONMETALS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES

Optional Information

Contract/Grant/Project number
KBN grant no. 3T11B01927
Notes
20 refs2 figs, 1 tab.