Published January 2006
| Version v1
Journal article
Effect of ion beam implantation on density of DLC prepared by plasma-based ion implantation and deposition
- 1. Graduate School of Engineering, University of Hyogo, Himeji (Japan)
- 2. Extreme Energy-Density Research Institute, Nagaoka University of Technology, Nagaoka (Japan)
Description
DLC (diamond-like carbon) films were prepared by the hybrid process of plasma-based ion implantation and deposition using acetylene plasma. The hydrogen content in DLC films decreased with the increase of negative pulsed voltage. The residual stress, density and hardness of DLC films had a peak at the negative pulsed voltage of 0 to -5 kV. At -5 to -20 kV, they had a correlation each other and considerably decreased with the increase of negative pulsed voltage
Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2005.08.203;
- PII
- S0168-583X(05)01540-5;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 242
- Journal Issue
- 1-2
- Journal Page Range
- p. 335-337
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 14. international conference on ion beam modification of materials
- Dates
- 5-10 Sep 2004
- Place
- Pacific Grove, CA (United States)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37068452
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACETYLENE; DENSITY; DEPOSITION; DIAMONDS; ELECTRIC POTENTIAL; FILMS; HARDNESS; HYDROGEN; ION BEAMS; ION IMPLANTATION; PEAKS; PLASMA; RESIDUAL STRESSES
- Descriptors DEC
- ALKYNES; BEAMS; CARBON; ELEMENTS; HYDROCARBONS; MECHANICAL PROPERTIES; MINERALS; NONMETALS; ORGANIC COMPOUNDS; PHYSICAL PROPERTIES; STRESSES
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.