Probe diagnosis of electron temperature and electron energy distribution in low-pressure dielectric barrier discharge

The double-probe method is used to diagnose electron temperature and electron energy distribution in low-pressure dielectric barrier discharge (DBD). In this paper, the principle and the setup of diagnosis are described and the experimental results are discussed briefly. The results demonstrate that its electron temperature decreases with the increasing gas-filled pressure and is higher than that in dc discharge under the same discharge condition. It is also evident from experiment that its electron energy distribution is evidently deviated from Maxwellian. There are electron groups of high energy and low energy in the DBD, and the electron group of high energy decreases gradually with the increasing pressure