Published June 15, 2009 | Version v1
Journal article

Advanced applications in microphotonics using proton beam writing

  • 1. Centre for Ion Beam Applications, Department of Physics, National University of Singapore, 2 Science Dr. 3, Singapore 117542 (Singapore)

Description

Proton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can be used for replication. In recent times we have explored the use of PBW for various advanced optical applications including fabrication of subwavelength metallic structures and metamaterials, direct write of silicon waveguides for mid IR applications and integrated waveguides for lab-on-a-chip devices. This paper will review the recent progress made in these areas with particular emphasis on the main advantages of using the PBW technique for these novel applications.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2009.03.035

Additional details

Identifiers

DOI
10.1016/j.nimb.2009.03.035;
PII
S0168-583X(09)00392-9;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
267
Journal Issue
12-13
Journal Page Range
p. 2280-2284
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
11. international conference on nuclear microprobe technology and applications; 3. international workshop on proton beam writing
Dates
20-25 Jul 2008
Place
Debrecen (Hungary)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
41021319
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
FABRICATION; METALS; POLYMERS; PROTON BEAMS; SEMICONDUCTOR MATERIALS; SILICON; WAVEGUIDES
Descriptors DEC
BEAMS; ELEMENTS; MATERIALS; NUCLEON BEAMS; PARTICLE BEAMS; SEMIMETALS

Optional Information

Copyright
Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.