Advanced applications in microphotonics using proton beam writing
Creators
- 1. Centre for Ion Beam Applications, Department of Physics, National University of Singapore, 2 Science Dr. 3, Singapore 117542 (Singapore)
Description
Proton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can be used for replication. In recent times we have explored the use of PBW for various advanced optical applications including fabrication of subwavelength metallic structures and metamaterials, direct write of silicon waveguides for mid IR applications and integrated waveguides for lab-on-a-chip devices. This paper will review the recent progress made in these areas with particular emphasis on the main advantages of using the PBW technique for these novel applications.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.nimb.2009.03.035Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2009.03.035;
- PII
- S0168-583X(09)00392-9;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 267
- Journal Issue
- 12-13
- Journal Page Range
- p. 2280-2284
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 11. international conference on nuclear microprobe technology and applications; 3. international workshop on proton beam writing
- Dates
- 20-25 Jul 2008
- Place
- Debrecen (Hungary)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 41021319
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- FABRICATION; METALS; POLYMERS; PROTON BEAMS; SEMICONDUCTOR MATERIALS; SILICON; WAVEGUIDES
- Descriptors DEC
- BEAMS; ELEMENTS; MATERIALS; NUCLEON BEAMS; PARTICLE BEAMS; SEMIMETALS
Optional Information
- Copyright
- Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.