Accumulation of structural defects near Si surface at molecular beam implantation

Published 2015 | Version v1

Miscellaneous Metadata-only

1. Gosudarstvennyj Politekhnicheskij Univ., Sankt-Peterburg (Russian Federation)

no abstract available

Additional details

Original title (Russian): Накопление структурных нарушений у поверхности Си при имплантации молекулярных ионов

Publisher: Universitetskaya kniga
Imprint Place: Moscow (Russian Federation)
Imprint Title: Summaries of reports of XLV International Tulinov conference on physics of interactions of charged particles with crystals
Imprint Pagination: 190 p.
Journal Page Range: p. 72
Report number: INIS-RU--607

Title: 45. International Tulinov conference on physics of interactions of charged particles with crystals
Original Conference Title: XLV mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates: 26-28 May 2015
Place: Moscow (Russian Federation)

Country of Publication: Russian Federation
Country of Input or Organization: Russian Federation
INIS RN: 49086248
Subject category: S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator: No Abstract, Conference, Numerical Data
Descriptors DEI: CRYSTAL DEFECTS; DEPTH; EXPERIMENTAL DATA; ION BEAMS; ION IMPLANTATION; KEV RANGE; MOLECULAR IONS; PHOSPHORUS FLUORIDES; PHOSPHORUS IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SPATIAL DISTRIBUTION; SURFACE PROPERTIES
Descriptors DEC: BEAMS; CHARGED PARTICLES; CRYSTAL STRUCTURE; DATA; DIMENSIONS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; INFORMATION; IONS; NUMERICAL DATA; PHOSPHORUS COMPOUNDS; PHOSPHORUS HALIDES; SEMIMETALS; SPECTROSCOPY

Notes: 1 ref. Imprint:Tezisy dokladov XLV mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami