Experimental study of damage and destroy of X-ray multi-layer reflector

The plasma environment which creates X-ray laser brings the difficulty to the application of X-ray multi-layer reflector. The most difficult is that the X-ray emitted by the plasma destroys and damages the multi-layer reflector. It is shown by the simulated test that the damaged threshold of Mo/Si multilayer reflector made in china is less than 0.10 J/cm2. With the exposure the radiation dose the rood-mean square roughness of multi-layer apparently increases and the reflectivity almost drops to zero. According to these results, the article state some ideas for preventing damages of the multi-layer reflector