Published May 1, 2008 | Version v1
Journal article

Spectral distribution of UV range diffuse reflectivity for Si+ ion implanted polymers

  • 1. Georgi Nadjakov Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, 1784 Sofia (Bulgaria)
  • 2. Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, 1784 Sofia (Bulgaria)
  • 3. Forschungszentrum Rossendorf e.V., PO Box 510119, D-01314 Dresden (Germany)

Description

The analysis of the UV range spectral characteristics can supply additional information on the formed sub-surface buried layer with implanted dopants. The near-surface layer (50 to 150 nm) of bulk polymer samples have been implanted with silicon (Si+) ions at low energies (E = 30 keV) and a wide range of ion doses (D = 1.1013 to 1, 2.1017 cm-2). The studied polymer materials were: ultra-high-molecular-weight polyethylene (UHMWPE), poly-methyl-metacrylate (PMMA) and poly-tetra-fluor-ethylene (PTFE). The diffuse optical reflectivity spectra Rd = f(λ) of the ion implanted samples have been measured in the UV range (λ = 220 to 350 nm). In this paper the dose dependences of the size and sign of the diffuse optical reflectivity changes λRd = f(D) have been analysed

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/113/1/012039

Additional details

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
113
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1742-6596

Conference

Title
15. international summer school on vacuum, electron and ion technologies
Acronym
VEIT 2007
Dates
17-21 Sep 2007
Place
Sozopol (Bulgaria)