A simple ion energy analyser equipped with a quadrupole mass spectrometer

A cylindrical mirror analyser to pass ions in the energy range from 0 to 10 eV and at the angle of incidence ranging from 70 to 110 is designed for a co-axial ion energy analyser (IEA) suitable for combining with a quadrupole mass spectrometer (QMS) for secondary ion mass spectrometry (SIMS). A mass resolution of the combination for Cr+ in SIMS measurement shows approximately that of the QMS in residual gas analysis. An ion detector using the combination to measure the energy distribution of sputtered secondary ions is calibrated with a Na+ ion gun. The energy resolution and the accuracy are within 5 eV and 0.5 eV, in the ion energy range of 5 to 60 eV respectively. Energy distributions of various metal ions in including Na+, K+, Cr+, Fe+, Al+, Cu+, Ni+, Ti+, and Si+ are measured under Xe ion bombardment of 0.5 to 2 keV. These are compared with energy distributions measured by other investigators. (auth.)