Charge state distribution studies of the metal vapor vacuum arc ion source

We have studied the charge state distribution of the ion beam produced by the MEVVA (metal vapor vacuum arc) high current metal ion source. Beams produced from a wide range of cathode materials have been examined and the charge state distributions have been measured as a function of many operational parameters. In this article we review the charge state data we have accumulated, with particular emphasis on the time history of the distribution throughout the arc current pulse duration. We find that, in general, the spectra remain quite constant throughout most of the beam pulse, as long as the arc current is constant. There is an interesting early-time transient behavior when the arc is first initiated and the arc current is still rising, during which time the ion charge states produced are observed to be significantly higher than during the steady current region that follows