Published July 2010 | Version v1
Journal article Metadata-only

Development of high-intensity Ar cluster ion beam equipment

Creators

  • 1. Kyoto Univ., Dept. of Nuclear Engineering, Kyoto (Japan)
  • 2. Kyoto Univ., Quantum Science and Engineering Center, Uji, Kyoto (Japan)
  • 3. Kyoto Univ., Dept. of Electronic Science and Engineering, Kyoto (Japan)

Description

Gas cluster ion beam (GCIB) is expected to be applied for analytical probe of organic compound. For the imaging of organic samples, the beam diameter and beam current density are the important factors. In this study, we developed GCIB equipment, and high intensity GCIB, which is more than 15 times as high as the conventional one was achieved. (author)

Additional details

Publishing Information

Journal Title
Annual Report of Quantum Science and Engineering Center
Journal Volume
12
Journal Page Range
p. 42-43
ISSN
1345-0700

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
43003801
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ARGON IONS; BEAM CURRENTS; CURRENT DENSITY; EQUIPMENT; ION BEAMS; ION PAIRS; ORGANIC MATTER; QUANTITATIVE CHEMICAL ANALYSIS; SPUTTERING; SURFACES
Descriptors DEC
BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; CURRENTS; IONS; MATTER

Optional Information

Notes
7 refs., 2 figs.