Reprint of: Determination of deuteron characteristic channeling parameters by simulation of RBS spectrum along Si <100>

In this paper, the channeling behavior of deuterons in the energy of 1400 keV along the <100> channel of Si was studied by the simulation of the channeling Rutherford spectrum in the backscattering geometry. The simulation was done by taking three considerations into account: (i) a minimum random component of the beam which enters the sample because of the scattering ions from the surface, (ii) the dechanneling starts at the greater penetration depths and (iii) the dechanneling follows a Gompertz type sigmoidal function with the two parameters which present the dechanneling rate and range, respectively. The Levenberg–Marquardt algorithm was used to set the best characteristic channeling parameters, the penetration depth at which the dechanneling starts, the energy loss and the dechanneling rate and range. The energy dependence of the ratio of channeling to random energy loss of deuterons in the energy range 1–2 MeV is investigated by comparing the determined value with the ones obtained in the other references. - Highlights: • The RBS/C spectrum of 1400 keV deuterons along the Si <100> was taken and analyzed. • A simulation method was proposed to determine characteristic channeling parameters. • The simulation was done based on the basic concept of the channeling phenomena. • The dechanneling process was clearly explained by the Gompertz sigmoidal function. • The energy loss ratio and its dependence on the energy of 1–2 MeV were studied.