Published December 1993 | Version v1
Journal article

On the methods of epitaxial boundaries exposure in hetero-compositions on A3B5

  • 1. Belorusskij Gosudarstvennyj Univ., Minsk (Belarus)

Description

Results are presented of using selective etching and anode oxidation for revealing epitaxial transitions in heteroepitaxial structures (HES) on GaAs and InP. It is shown that the etchant of composition of K3xFe(CN)6(2.5g)+KOH(3g)+H2O(25 ml) provides for the best results for visualization of layers in HES on InP. Treatment in that etchant permits to reveal not only the transition of InP-ternary solution but and boundaries of adjacent regions of InPyAs1-4 with different y

Additional details

Additional titles

Original title (Russian)
К методике выявления эпитаксиальных границ в гетерокомпозициях на А

Publishing Information

Journal Title
Neorganicheskie Materialy
Journal Volume
29
Journal Issue
12
Journal Page Range
p. 1601-1604.
ISSN
0002-337X
CODEN
NEOMB8