Study on process technologies of elements for nuclear electronics

Electronics used in nuclear reactors and atomic robots are exposed to high temperatures and high radiation, and then, the electronics are necessary to work stability in such severe conditions. The typical semiconductor Si is at the limit in physical properties, and new ones are required to be developed. In this study, SiC promising superior characteristics in both heat and irradiation resistance, was selected and the manufacturing process have been developed based on elucidation of oxidative mechanism of the film formed at the interfaces. The practical use of the manufacturing process was in sight. In addition, the SiC device fabricated was shown to be useful in excellent irradiation resistance. (author)