Published 1989 | Version v1
Journal article

A fundamental approach to surface evolution during growth and erosion

  • 1. Salford Univ. (UK). Dept. of Electrical Engineering

Description

A concise and critical review of the basic ideas of the kinematic model of surface evolution during growth and erosion is presented. Further generalisation of a recent development based on the Huygens principle of wavefront propagation is discussed. A number of simulation examples of surface evolution are given to illustrate the advantages and capabilities of the generalised model. (author)

Additional details

Publishing Information

Journal Title
Vacuum
Journal Volume
39
Journal Issue
11-12
Series
Vacuum.
Journal Page Range
1069-1075
ISSN
0042-207X
CODEN
VACUA

Conference

Title
5. international conference.
Acronym
Low energy ion beams - 5
Dates
3-6 Apr 1989.
Place
Guildford (UK).

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
21033184
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
EROSION; ETCHING; GRAIN GROWTH; ION BEAMS; KINETICS; MICROELECTRONICS; REVIEWS; SIMULATION; SURFACE TREATMENTS; SURFACES; USES; WAVE PROPAGATION
Descriptors DEC
BEAMS; DOCUMENT TYPES