Epitaxial growth of (001)-oriented Ba0.5Sr0.5TiO3 thin films on a-plane sapphire with an MgO/ZnO bridge layer
Creators
- 1. Department of Electrical and Computer Engineering, Virginia Commonwealth University, Richmond, Virginia 23284 (United States)
- 2. Naval Research Laboratory Washington, Washington, DC 20375 (United States)
Description
High quality (001)-oriented Ba0.5Sr0.5TiO3 (BST) thin films have been grown on a-plane sapphire (1120) by rf magnetron sputtering using a double bridge layer consisting of (0001)-oriented ZnO (50 nm) and (001)-oriented MgO (10 nm) prepared by plasma-assisted molecular beam epitaxy. X-ray diffraction revealed the formation of three sets of in-plane BST domains, offset from one another by 30 deg., which is consistent with the in-plane symmetry of the MgO layer observed by in situ reflective high electron energy diffraction. The in-plane epitaxial relationship of BST, MgO, and ZnO has been determined to be BST [110]//MgO [110]//ZnO [1120] and BST [110]/MgO [110]//ZnO [1100]. Capacitance-voltage measurements performed on BST coplanar interdigitated capacitor structures revealed a high dielectric tunability of up to 84% at 1 MHz.
Additional details
Identifiers
- DOI
- 10.1063/1.3266862;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 95
- Journal Issue
- 21
- Journal Page Range
- p. 212901-212901.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 41040535
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BARIUM COMPOUNDS; CAPACITANCE; CAPACITORS; CRYSTAL GROWTH; DEPOSITION; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ELECTRON DIFFRACTION; ELECTRONS; LAYERS; MAGNESIUM OXIDES; MOLECULAR BEAM EPITAXY; SAPPHIRE; SPUTTERING; STRONTIUM COMPOUNDS; THIN FILMS; TITANATES; X-RAY DIFFRACTION; ZINC OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; CORUNDUM; CRYSTAL GROWTH METHODS; DIFFRACTION; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; ELEMENTARY PARTICLES; EPITAXY; EQUIPMENT; FERMIONS; FILMS; LEPTONS; MAGNESIUM COMPOUNDS; MATERIALS; MINERALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZINC COMPOUNDS
Optional Information
- Notes
- (c) 2009 American Institute of Physics