Published May 1, 1991
| Version v1
Journal article
A microstructural study of indium-indium oxide composite films
Creators
- 1. Department of Physics, Pohang Institute of Science and Technology, Pohang, P. O. Box 125, 790-600, Korea (Republic of Korea)
- 2. Department of Materials Science and Engineering, Pohang Institute of Science and Technology, Pohang, P. O. Box 125, 790-600, (Korea)
Description
We have investigated the microstructure of indium-indium oxide composite films prepared by thermal vapor deposition in the oxygen atmosphere. The films show granular-amorphous structural phase transformation near the oxygen concentration of 2 x 10-4 Torr. Although the thermal evaporation generates films with indium grains much larger in size than the reactive sputter deposition, the film resistivity shows the characteristics of the homogeneous films as long as the thickness is larger than the grain size
Additional details
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 69
- Journal Issue
- 9
- Series
- J. Appl. Phys.
- Journal Page Range
- 6716-6718
- ISSN
- 0021-8979
- CODEN
- JAPIA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 22076151
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Descriptors DEI
- CRYSTAL-PHASE TRANSFORMATIONS; GRANULAR MATERIALS; INDIUM; INDIUM OXIDES; MICROSTRUCTURE; SUPERCONDUCTING FILMS; SUPERCONDUCTIVITY
- Descriptors DEC
- CHALCOGENIDES; CRYSTAL STRUCTURE; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; INDIUM COMPOUNDS; MATERIALS; METALS; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES