Published May 1, 1991 | Version v1
Journal article

A microstructural study of indium-indium oxide composite films

  • 1. Department of Physics, Pohang Institute of Science and Technology, Pohang, P. O. Box 125, 790-600, Korea (Republic of Korea)
  • 2. Department of Materials Science and Engineering, Pohang Institute of Science and Technology, Pohang, P. O. Box 125, 790-600, (Korea)

Description

We have investigated the microstructure of indium-indium oxide composite films prepared by thermal vapor deposition in the oxygen atmosphere. The films show granular-amorphous structural phase transformation near the oxygen concentration of 2 x 10-4 Torr. Although the thermal evaporation generates films with indium grains much larger in size than the reactive sputter deposition, the film resistivity shows the characteristics of the homogeneous films as long as the thickness is larger than the grain size

Additional details

Publishing Information

Journal Title
Journal of Applied Physics
Journal Volume
69
Journal Issue
9
Series
J. Appl. Phys.
Journal Page Range
6716-6718
ISSN
0021-8979
CODEN
JAPIA