Published 1988 | Version v1
Book Metadata-only

High repetition rate high power excimer lasers

Creators

  • 1. Rand Afrikaans Univ., Johannesburg (South Africa)

Description

The authors report on the development of high repetition rate, high average power excimer laser systems with projected repetition rates of several kHz and multi kilowatt outputs. An optimized system concept has been derived by theoretically and experimentally comparing the various system options. Preliminary results are presented for a compact spark-preionized KrF and XeCl excimer laser system operating at repetition rates of up to 800 Hz and being capable of average output powers of more than 300 W. The laser is excited by a single-thyratron switched LC-inversion circuit, utilizing single or double stage pulse compression

Additional details

Publishing Information

Publisher
SPIE Society of Photo-Optical Instrumentation Engineers.
Imprint Place
Bellingham, WA (USA)
Imprint Title
Excimer lasers and applications
Imprint Pagination
276 p.
Series
SPIE - Volume 1023.
Journal Page Range
p. 20-24.

Conference

Title
Excimer lasers and applications.
Dates
21-23 Sep 1988.
Place
Hamburg (Germany, F.R.).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
21055103
Subject category
S74: ATOMIC AND MOLECULAR PHYSICS;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
BEAM OPTICS; EXCIMER LASERS; EXCITED STATES; EXPERIMENTAL DATA; GAIN; GAS COMPRESSORS; INTERACTIONS; KRYPTON FLUORIDES; OPTIMIZATION; PERFORMANCE; PULSE GENERATORS; SPECIFICATIONS; STIMULATED EMISSION; THEORETICAL DATA; THYRATRONS; XENON CHLORIDES
Descriptors DEC
AMPLIFICATION; AMPLIFIERS; CHLORIDES; CHLORINE COMPOUNDS; COMPRESSORS; DATA; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EMISSION; ENERGY LEVELS; ENERGY-LEVEL TRANSITIONS; EQUIPMENT; FLUORIDES; FLUORINE COMPOUNDS; FUNCTION GENERATORS; GAS DISCHARGE TUBES; GAS LASERS; HALIDES; HALOGEN COMPOUNDS; INFORMATION; KRYPTON COMPOUNDS; LASERS; NUMERICAL DATA; RARE GAS COMPOUNDS; XENON COMPOUNDS

Optional Information

Secondary number(s)
CONF-8809124--.