Published October 1, 2017 | Version v1
Journal article

Monitoring of conditions inside gas aggregation cluster source during production of Ti/TiOx nanoparticles

  • 1. Department of Macromolecular Physics, Faculty of Mathematics and Physics, Charles University, V Holešovičkách 2, Prague, 18000 (Czech Republic)
  • 2. Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University, V Holešovičkách 2, Prague, 18000 (Czech Republic)

Description

Gas aggregation sources are nowadays rather widely used in the research community for producing nanoparticles. However, the direct diagnostics of conditions inside the source are relatively scarce. In this work, we focused on monitoring the plasma parameters and the composition of the gas during the production of the TiOx nanoparticles. We studied the role of oxygen in the aggregation process and the influence of the presence of the particles on the plasma. The construction of the source allowed us to make a 2D map of the plasma parameters inside the source. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6595/aa88e8

Additional details

Identifiers

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
26
Journal Issue
10
Journal Page Range
[12 p.]
ISSN
0963-0252

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
49075193
Subject category
S36: MATERIALS SCIENCE; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
AGGLOMERATION; MONITORING; NANOPARTICLES; OXYGEN; PLASMA; TITANIUM; TITANIUM OXIDES
Descriptors DEC
CHALCOGENIDES; ELEMENTS; METALS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PARTICLES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS