Optimization of a sputtering chamber for the production of neutron optical components

A computer controlled sputtering chamber for coatings with high precision and homogeneity on large area surfaces was installed at the UCN group of the Institute of Physics, Mainz University. With this device sandwich-like structures of alternating materials, e.g. Nickel and Titanium, can be deposited on flat substrates. These structures have applications as neutron optical components in fundamental experiments with UCN. This talk will outline the steps taken to achieve homogeneous and reproducible multilayer coatings and give a brief example for an application in a current UCN experiment.