Design foundation of vacuum system for electron beam machine

Vacuum system is a main part of electron beam Machine because (EBM) the electron can not be produced without this vacuum. Vacuum system consists of vacuum pump, connecting pipe, valve, and vacuum gauge. The design vacuum system of EBM, basis knowledge and technology of vacuum is needed. The paper describes types of vacuum pump, calculation of pipe conductance and pumping time of vacuum system then there are used as consideration of criteria to choose vacuum pump for EBM. From the result of study, it is concluded that for EBM of 500 keV/10 mA which is going to use for wood coating and with consideration of economic and technic factor it is better to use diffusion pump. (author)