Use of specific features in secondary electron angular distribution for increase of sensitivity of quantitative analysis in Auger electron spectroscopy

A simple method of increasing the sensitivity of the method of electron Auger-spectroscopy characterized by the selection of optimal geometrical conditions of the experiment, namely, a bunch of initial electrons falls on the targets at an angle close to sliding, while the recording of auger electrons is carried out in the normal direction to target surface, is suggested. It is shown that the use of the geographical factor greatly increases the signal/background ratio and permits to record nondifferented auger-spectra with sufficiently high auger-peaks. The vivid nature of such spectra makes it easy to analyze experimental data, lowers the possibility of errors and makes the method of electron auger-spectroscopy accessible for a wide range of scientists