Published December 15, 2009 | Version v1
Journal article Metadata-only

Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate

Creators

  • 1. Department of Mechatronics Engineering, National Changhua University of Education, Changhua, 50058, Taiwan (China)
  • 2. System Control and Integration Division, Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, 30076, Taiwan (China)
  • 3. PCB Department, Tongtai Machine and Tool CO., LTD, Kaohsiung, 82151, Taiwan (China)

Description

In this research the laser beam shaper component has been used to obtain top-hat intensity distribution laser beam to perform line scribing and to perform electrode patterning on Indium thin oxide (ITO) thin films deposited on glass and plastic substrate. ITO films were removed with third harmonic Nd:YAG laser processing system. The pulse duration, laser output power, pulse repetition rate and scanning speed parameters of straight line patterning and electrode patterning on different types of substrates were discussed, respectively. The experimental results are measured by optical microscope and scanning electron microscope to evaluate the processing parameters and surface properties of ITO thin films.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.tsf.2009.06.063

Additional details

Identifiers

DOI
10.1016/j.tsf.2009.06.063;
PII
S0040-6090(09)01124-9;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
518
Journal Issue
4
Journal Page Range
p. 1072-1078
ISSN
0040-6090
CODEN
THSFAP

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
42058024
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
BEAM SHAPING; DISTRIBUTION; ELECTRODES; GLASS; INDIUM OXIDES; NEODYMIUM LASERS; OPTICAL MICROSCOPES; PLASTICS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE PROPERTIES; THIN FILMS; TIN OXIDES
Descriptors DEC
CHALCOGENIDES; ELECTRON MICROSCOPY; FILMS; INDIUM COMPOUNDS; LASERS; MATERIALS; MICROSCOPES; MICROSCOPY; ORGANIC COMPOUNDS; ORGANIC POLYMERS; OXIDES; OXYGEN COMPOUNDS; PETROCHEMICALS; PETROLEUM PRODUCTS; POLYMERS; SOLID STATE LASERS; SYNTHETIC MATERIALS; TIN COMPOUNDS

Optional Information

Copyright
Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.