Gas permeation properties and preparation of carbon membrane by PECVD method using indene as precursor

This work could demonstrate a new approach to the fabrication of gas separation membrane using indene as polymeric precursor for low pressure PECVD system. Membrane characterization was done by taking Scanning Electron Microscopy (SEM) and FTIR measurements. For membrane performance testing, permeability and selectivity of the membrane were evaluated with pure gases of H₂, N₂, and CO₂ using a differential permeation technique. PECVD-derived polyindene membrane showed selectivities of 8.2 and 4.0 for H₂/CO₂ and H₂/N₂, respectively, at room temperature. Polyindene (PIn) membrane was successfully fabricated onto a zeolite 5A substrate via radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) at room temperature. (paper)